A Novel Scanning Probe Array with Multiple Tip Sharpness for Variable-Resolution Scanning Probe Lithography Applications

We report the development and application of a novel scanning probe array that consists of "blunt" and "sharp" tips with precisely defined contact areas. A new micromachining process based on SOI (silicon-on-insulator) substrates has been successfully developed to enable the fabrication of the scanning probe array. To demonstrate its capability for variable-resolution scanning probe lithography, the scanning probe array has been used to simultaneously generate fluorescent patterns with different linewidths in a parallel mode.