Investigation of PECVD SiC nano film

PECVD SiC nano thin films have been investigated. The element component was controlled by gas resources and residual stress was controlled by furnace annealing. The results of XRD, HRTEM measured show formation of SiC nano crystalline structure through a structure re-ordering by laser annealing, and the performance of PECVD SiC film is ameliorated with the nano crystalline. The nanoindentation test shows the SiC's hardness and Young's modulus has been improved. The resistant of SiC thin films has been reduced effectively by in-situ doped together with laser annealing.