Fabrication of lenses for AlGaInP LEDs using Step and Flash Imprint lithography

This paper describes a new data preparation technique, which allows for the design of optical lenses in a conventional CAD package and immediate transfer to a lithographic system, for example Electron Beam or Focused Ion Beam Lithography. Most importantly, we show that this approach could be used to fabricate lens arrays in templates for Step-and Flash Imprint lithography onto 4"wafers. One application for this is to enhancing AlGaInP LED performance by texturing the top current spreading layer.