Self-aligned chemically assisted ion-beam-etched GaAs/(Al,Ga)As turning mirrors for photonic applications

It is shown that totally reflecting turning mirrors can be fabricated in GaAs/(Al,Ga)As graded-index separate-confinement-heterostructure single-quantum-well (GRIN-SCH SQW) material using Ti metal masking and Cl/sub 2/ chemically assisted ion-beam-etching (CAIBE). Combined with ridge waveguides, these techniques have been used to make turning-mirror cleaved-facet lasers that have acceptable external slope efficiencies with a modest estimated increase in threshold current. Scanning electron microscope examination of the mirrors indicates some residual roughness attributed to the edge definition of the deposited titanium film. The mirror loss is estimated to be 68% for these particular turning mirrors. These components, which continue to be developed and improved, are being applied to increasingly sophisticated and demanding photonic programs.<
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