Design and characterization of a linear motion piezoelectric micropositioner

Small, lightweight, fast micropositioners provide fast, precise motion for applications in precision manufacturing. A description is given of the design and characterization of a precise linear micropositioner. The device is constructed from a number of piezoelectric plates placed on both sides of a sliding mass. Actuation of the plates in an accordion fashion provides a linear displacement of +or-0.36 mm. In addition, the device has a force capability of over 80 g, as well as position and force sensing capabilities. The dynamic performance of the device is characterized, and initial tests show that it has a second-order system behavior with nonlinear response. The device resolution is affected by the performance of the capacitive-type position sensor and varies from 3 mu m to less than 0.6 mu m.<
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