Magnetic Properties and Structure of FeN/AlN Multilayered Films

Magnetic properties and structure of FeN/AlN multilayered films deposited by r.f. magnetron sputtering were studied. H_c decreased as the ratio of FeN to AlN layer thickness became small. H_c also decreased with decreasing film thickness of FeN/AlN bilayers. H and 4πM_s in a 22Å/11Å multilayered film were 1 Oe and 8.5 kG, respectively. The film had high permeability, μ', 800 at 5 MHz and 650 even at 100 MHz because of high resistivity. SEM observation and μ-AES analysis revealed the film had a layered structure. X-ray diffraction made it clear that high permeability was ascribed to fine grains and smaller lattice mismatch between layers compared to thick layered films.