Thermal Stability of Fe-Zr/Fe-Zr-N Soft Magnetic Multilayered Films

stract-Fe-Zr/Fe-Zr-N multilayered films were prepared by alternation of Fe-Zr sputtering and electron cyclotron resonance (ECR) plasma nitridation. Thermal stability of the films' soft magnetic properties was investigated. A saturation flux density of B
_s
=1.8 T, coercivity H
_c
=88 A/m and relative permeability μ'≫3000 (at 20 MHz) were obtained for Fe
₉₂
Zr
₈
/Fe
₉₂
Zr
₈
-N multilayered film after annealing at 773K for 3600 s. Addition of Zr to Fe/Fe-N multilayered films effectively improves the thermal stability of soft magnetic properties.