Absolute Value Measurements of Thin Film Permeability

A method for highly precise measurement of the permeability of thin films in the VHF frequency range has been developed. The permeability of a film sample in a strong magnetic field can be predicted with very high accuracy; this permeability is then used as the standard of a measurement system. Multilayer films with various spacer thicknesses and a FeZrN micro-crystalline film were measured. Results showed that eddy current losses in the multilayer films cannot be suppressed even with insulating spacers as thick as 2000Å, and that the micro-crystalline film exhibits relatively high losses in the high-frequency range.