MEMS Based True Time Delay Technology for Phased Antenna Array Systems

Phased antenna array (PAA) systems play an important role in modern radar and communication technologies. In order to satisfy the broadband requirement of future PAA systems, a true time delay approach is preferred over phase delay approaches. Several true time delay methods for PAA beam steering and beam shaping are compared at K-Band and Ka-Band frequencies. Fabrication details and test results for Ka- Band micro-electro-mechanical systems (MEMS) based true time delay lines are presented.