Integrating Passive Components With Active Circuits Using Standard Silicon Process for Millimeter-Wave Applications

Several passive components based on the quarter- wavelength transmission line can be integrated with active circuits for millimeter-wave applications. Passive components such as Marchand baluns, quadrature couplers, and rat-race hybrids are directly implemented on the standard low-resisitivity (~10 Ω· cm) silicon substrate. New circuit design concepts such as balanced loss and distortionless transmission line are applied to tolerate the unavoidable loss and thus the size reduction is achieved because of the high effective dielectric constant.