Technological Methods for Low Temperature Microfluidic Devices Microfabrication

The microchannel based microfluidic devices were obtained using techniques assuming thermal treatments up to 1000°C affecting the processes previously realized on the IC chip. This paper aims to realize low temperature technological processes to obtain microfluidic devices used for biological applications, and in thermal transfer as micro-heat sinks, used in IC chip cooling. The both methods use the positive resist as a sacrificial layer, for the first one having thickness 2 μm obtaining semicircular channels with applications in biology, for second one 15-20 μm, obtaining near-rectangular channels having applications in thermal transfer for IC chip cooling.