A novel electromagnetically actuated resonant MEMS scanning mirror with large deflection

This work presents a novel electromagnetically actuated microelectromechanical systems (MEMS) scanning mirror with large deflection for optical scanning applications. This optical scanning mirror with large size of 6times4 mm
²
has been implemented using bulk etching micromachining process, and electroplating technique. Moreover, the electromagnetical actuator with moving coils is employed to realize the large deflection combining with a strongly magnetic field. The whole wafer with the thickness of 310 mum is exploited to increase the stiffness of mirror and reduce the deformations of mirror due to thermal strain. After measuring it, the maximum optical deflection angle of our optical scanner is plusmn15deg at lower power consumption of 708 muW, the resonant frequency associated with the torsional mode is 838 Hz with a quality factor of 214 in air. Additionally, this MEMS scanning mirror as a precise optics element presents good surface flatness, roughness and high reflectivity, so our MEMS optical scanning mirror is suitable to being applied in some scanning systems such as high speed micro-spectrometer and optical tunable filter in optical communication.