Research on the Structure of High-speed Large-scale Ultra-precision Positioning System

According to the needs in such fields as IC manufacturing and ultra-precision machining, a precision positioning system based on macro-micro dual-drive was developed. The macro positioning system is a two dimensional high-speed large-scale precision positioning system based on linear motor drive. The micro positioning system is a low speed ultra-precision positioning system based on the PZT and flexure hinge. The two systems are combined in order to achieve high-speed large-scale ultra-precision position. To the advance of our research, we have done some experimental research on the macro positioning system. The experiment results show that the macro positioning system can position at micron accuracy in the large workspace of 300mm × 300mm under the condition of design load. Square of the carrying platform is 250mm × 250mm. The positioning accuracy is less than 3μm and the maximum velocity of this system can reach 500 mm/s.