Design Optimization of a SiGe/Si Quantum-Well Optical Modulator

In this paper, design optimization of a SiGe/Si quantum-well optical modulator integrated on silicon-on-insulator (SOI) substrate to achieve high-frequency operation is reported. The structure, based on free-carrier depletion in a PIN diode, is integrated in a rib waveguide. Influence of geometrical parameters, layer doping, and metal contacts is determined through numerical simulations and optimized structures are defined. The obtained figure of merit V
_pi
L
_pi
is 1.8 V-cm.