Development of high spatial resolution x-ray radiography system equipped with multiwalled carbon nanotube field emission cathode

In this paper, newly developed high spatial resolution X-ray radiography system (HR-XRS) by modifying the compact SEM equipped with the MWCNT cathode former was reported. The X-ray images of the Cu 300 mesh were taken as a demonstration of the XRS. The resolution less than 1 mum was achieved. It is suggested that the MWCNT cathode is suitable one for the HR-XRS.