Technology Challenges for CMOS VLSI

Over the past decade, MOS technology had advanced from 10 l μm minimum feature size in production in 1971 to 2.5 μm minimum feature size in production in 1981. Resulting from this technology advance have come performance and cost improvements which are dramatically illustrated by advances in MOS RAM technology: 1 kbit RAMs having 5000 transistors in 1971 to 64 kbit RAMs having 100,000 transistors in 1981.