Fabrication of Photonic Ring Resonator Device in Silicon Waveguide Technology Using Soft UV-Nanoimprint Lithography

We report on an innovative fabrication method for high-quality resonant photonic devices on silicon-on-insulator substrates with quality (
Q
)-factor of 47 700 and propagation losses of 3.5 dB/cm. The definition of a resonator device using soft ultraviolet-nanoimprint lithography is detailed followed by description of an adapted structure transfer process. Spectral response measurements and propagation loss analysis were carried out evidencing the functionality of the fabricated resonator.