Harmonic and Intermodulation Distortion Output of a Radio-Frequency Plasma Capacitor

This letter investigates the harmonic and intermodulation distortion behavior of a prototype plasma capacitor proposed for use as a radio-frequency control device. Experiments at a fundamental frequency of 900 MHz show second and third order harmonic output as high as -29 dBc and -35 dBc respectively for a 20 dBm input. Intermodulation distortion measurements are also performed at difference frequencies of 200 kHz and 1 MHz.