Deformable Polymer Adaptive Optical Mirrors

The design, fabrication, and evaluation of deformable polymer-based micromirror devices for adaptive optic applications are described. For the mirror membranes, a freestanding polymer foil is used, which features key advantages with respect to its mechanical behavior when compared with the silicon-micromachined membranes. The fabrication technology, mirror-membrane design, packaging, and operation in a feedback-controlled closed-loop system are outlined. The feasibility for the use of the prototypes in advanced adaptive optic systems is evaluated.