Coarse and fine motion micro robot with six degrees of freedom

Displacement of a micro robot is described theoretically and experimentally. The structure of the robot is a Stewart-platform using six stacked-type piezoelectric actuators. The robot, which can realize a precise motion, is developed for a flexible conveying system, such as a desktop manufacturing system. The robot is used in a micro/nano system which requires a nanometer resolution. We describe the principle of the motion and demonstrate the self-propelled motion and the precise motion.