Compact Soft X-ray Lasers for Imaging, Material Processing, and Characterization at the Nanoscale

We have developed compact laser-pumped and discharge-pumped lasers operating at wavelengths of λ=13.2nm and λ=46.9nm respectively, and have used them in the demonstration of nanoscale full field imaging, nanopatterning, and nanoscale laser ablation. Using these new compact short wavelength lasers we have built two microscopes, using λ=46.9nm or λ=13.2nm laser illumination. The compact λ=46.9nm microscope condenses the light using a multilayer coated Schwarzschild mirror, and images the test object using a diffractive zone plate lens. By rearranging the optics, the λ=46.9nm microscope can also image surfaces. We have recently added the capability to spectroscopically analyze the light emitted from the plasma created during the ablation, opening the possibility to develop analytic nanoprobes. All of these results illustrate the capabilities of compact short wavelength lasers for nanotechnology applications.