T5 What makes Moore’s law continue? — Recent advances in semiconductor

Summary form only given. Many people wandered whether Moore's law could continue at 90 nm and beyond about 4 years ago. Apparently, we have survived, and Moore's law has continued, and is still continuing. In this tutorial, it will explore what has made Moore's law continued, and what is making Moore's law continuing. The tutorial will first review issues and challenges in semiconductor, the crisis of lithography and of power. It then discusses solutions and workarounds in detail that make Moore's law continue. They include RET, OPC, PSM, EUV, multi-core, MTCMOS, clock gating, multi-Vt, voltage island, power gating, strain silicon, SOI, high-k and metal gate and other advanced silicon innovations.