PCB-MEMS RF Switch: Parametric analysis and design guide lines

In this paper, we introduce a recent concept that applies MEMS technical procedures to Printed Circuit Boards (PCB). This is a novel technology for RF MEMS components. Particularly MEMS switches, can be fabricated on any PCB substrate enabling monolithic integration with others elements on the same substrate offering adaptability features to the communication systems. For comparison purposes with our previous work of MEMS switch on alumina substrates, we calculated the main parameters for practical design of MEMS devices on the PCB scale. Nowadays technology of PCB-MEMS employs different metals for the bridge to form the shunt type switch. So, we introduce a new technique for PCB-MEMS switch using copper as the metal at the bridge. Thus, we can construct a MEMS switch with the same material of the printed circuit board.