Preparation and Properties of Lithium-doped K0.5Na0.5NbO3 Thin Films by Chemical Solution Deposition

Lithium doped K
_0.5
Na
_0.5
NbO
₃
films were fabricated by chemical solution deposition on Pt/TiO
₂
/SiO
₂
/Si substrates. Homogeneous and stable precursor solutions were prepared by controlling the reaction of starting metal alkoxides. Perovskite KNN single phase thin films were successfully synthesized on Pt/TiO
_x
/SiO
₂
/Si substrates. The 1.2μm-thick KLNN film annealed at 650°C exhibited a ferroelectric polarization hysteresis loops at -250°C. The loop at room temperature is round in shape indicating the film contains leakage components. Dielectric constant under zero bias is 490 at room temperature. Typical upside-down butterfly DC bias-capacitance curve was obtained in the KLNN film capacitors at room temperature, indicating polarization reversal occurs in the obtained KLNN films.