Simulation of Gas-Phase Kinetics in $\hbox{CHF}_{3}:\hbox{H}_{2}: \hbox{O}_{2}$ Mixtures

A gas-phase reaction model for and mixtures was developed. Self-consistent electron impact cross-section set for was introduced. The original total and partial dissociation cross sections were received. A developed gas-phase kinetic scheme was tested on the experimental data. An important role of the chain reactions in the kinetics of F and H atoms and radicals was revealed.