Manipulation of Dispersion Properties of Two-dimensional Photonic Crystal Slab Waveguides by Atomic Layer Deposition

In addition to the growing interest within the semiconductor industry, atomic layer deposition (ALD) has also become an attractive tool to engineer and manipulate with extreme precision the complex dielectric architecture of three-dimensional photonic crystals (PCs). Very recently, we proposed to apply this technique to 2D PC slab waveguides.