On-chip Integration of Microfluidic Channels with Ultra-high Q Silicon Microdisk Resonators for Lab-on-a-Chip Sensing Applications

This study demonstrates the design, fabrication, and characterization of a sensing platform based on the on-chip integration of such silicon-based microdisk resonators (with ultra high Q > 10
⁶
) with microfluidic channels for sample delivery. Tuning of the resonance features using fluid in upper-cladding as well as applications in lab-on-a-chip sensing are reported.