A planar resonant-tunneling field-effect transistor

The authors report on the fabrication of double-barrier planar resonant-tunneling field-effect transistors. The layers used are modulation-doped GaAs/AlGaAs heterostructures grown by molecular beam epitaxy. The devices can be operated in a regular FET mode by lowering the gate-induced barriers below the Fermi energy. A clear oscillatory behavior of the source-drain current I/sub DS/ as a function of gate bias V/sub GS/ below threshold can be observed at 4.2 K, with both gates connected together, a manifestation of resonant tunneling.