MEMS Gyroscope Performance Estimate Based on Allan Variance

The performance of MEMS gyroscope is crucial to its application, and the zero-bias stability is the main characteristic parameter of gyroscope performance. In this paper, a method of using Allan variance is presented. Experimental results using this method with gyroscopes of different precision show that Allan variance is a reasonable tool to analyze the performance of MEMS gyroscopes. Through analyzing Allen variance, the performance of MEMS can be estimated with precision and a large amount of data is not necessary as with standard variance.