Novel Microrobots and Micromotors Using Lorentz Force Driven Linear Microactuators Based on Polymer Magnets

This paper reports on the development of several novel microelectromechanical systems (MEMS) machines based on linear Lorentz force actuators. These were monolithically fabricated and include micromachined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape, and properties. By combining these linear actuators with mechanical compliant structures using Epon SU-8, we were able to build in-plane and out-of-plane micropositioners, micromotors, and microgrippers.