Thermal Characterization of Porous Silicon Micro-Hotplates using IR Thermography

In this work we used combined IR measurements with a thermocamera as well as electrical measurements in vacuum, in order to accurately estimate the temperature that develops on Porous Silicon micro-hotplates of various designs. An overall emissivity value ε=0.25 has been used, obtained from the simulation of the electrical data for various micro hotplate designs. The estimated temperature is in good agreement with the simulated results.