Driving of Micromirror and Simultaneous Detection of Rotation Angle using Integrated Piezoresistive Sensor

A piezoresistive rotation angle sensor is integrated in a micromirror driven by the electrostatic vertical comb drive actuator. The sensor signal is the voltage generated by the shear piezoresistance effect. Driving the electrostatic actuator, the sensor signal is measured. The sensor signal is confirmed to be proportional to the mirror rotation angle. The hysteresis of the sensor signal is found to be less than that observed under the open-control of the micromirror.