Stability Improvement of Surface Acoustic Wave Motor using Chemically Reduced Lithium Niobate

Stability of friction drive of a surface acoustic wave motor has been improved by adopting chemically reduced lithium niobate. Through experimental and analytical investigations, we clarified the low electric conductivity coupled with pyroelectricity of lithium niobate stator hindered the stable friction drive operation. We indicated that the conductivity improved LN, by chemical reduction, would then prevent the unstable reasons, i.e., the contact electrification and meniscus stiction.