Technology, Design, and Implementation of High-K MIM Capacitors for High di/dt Applications: Microprocessor, IO, and Clocking

In this work a MIM capacitor used to decouple the internal power supply is shown. The 8fF/um
²
planar MIM capacitors of the 90 nm SOI technology are formed by physical vapor deposition of alternating layers of HfO
₂
and Ta
₂
O
₅
dielectrics between TaN electrodes.