Design and Fabrication of Microactuators and Sensors for MEMS

This paper reports the results for various microelectromechanical systems, devices and structures fabricated using bulk and surface micromachined processes. These microelectromechanical systems (MEMS) are designed and fabricated at the Semiconductor Micro-Fabrication Facility Laboratory at Rochester Institute of Technology. The microactuators and sensors are designed and fabricated for proof-of-concept lab-on-a-chip systems. The experimental results, which include testing, evaluation and characterization of microelectromechanical actuators and sensors, are reported.