Fabrication and Characterization of Superconducting NbN Nanowire Single Photon Detectors

We report on the fabrication and characterization of high-speed, single photon detectors using superconducting NbN nanowires at a wavelength of 1064 nm. A 15 by 15 microns detector with a detector efficiency of 40% has been measured. Due to kinetic inductance, the recovery time of such large area detectors is longer than that of smaller or single wire detectors. The recovery time of our detectors (50 ns) has been characterized by measuring the inter-arrival time statistics of our detector.