Spiral Inductors Using Polymer-Core Conductors

We made thick spiral inductors using a polymer-core conductor. The proposed fabrication process to make the polymer-core conductor is very easy and cost effective compared with other radio frequency microelectromechanical systems processes. SU-8 photoresist was used as the core. The fabricated spiral inductors on a high resistivity silicon, 2500 Omega have a very high Q factor of more than 40 at 2 GHz.