Fully Packaged 4-bit 100 ps RFMEMS Time Delay

This paper presents results of a fully packaged RFMEMS 4-bit, 100-ps capacitive time delay. The time delays are packaged using wafer scale low-loss and broad-band packaging technology developed at MIT Lincoln Laboratory (MIT-LL). The 4-bit 100 ps time delay has 1.8 dBplusmn1 dB insertion loss from 5-20 GHz.