Formation of the multilayered Co/Pd nanowire array by atomic image projection electron beam lithography (AIPEL) and the magnetic anisotropy

Multilayered Co/Pd nanowire array were obtained from atomic image projection electron beam lithography (AIPEL) and combined novel etching technique using amorphous Si layer. The role of dipolar interaction in magnetic anisotropy of the nanowire array was studied. The structural information were obtained by HR-TEM, XRD, SEM and AFM. The magnetic properties were measured by SQUID and vibrating sample magnetometry.