Qualification and Quantification of Speed Loss: Equipment Throughput Optimization by means of Speed Loss Analysis

Consistent with the Semiconductor Industry's focus on continuous improvement, increased throughput and shorter cycle times, this paper describes a methodology for the qualification and quantification of Speed Loss at a toolset level. In addition, a case study of an Etch AMAT toolset, which utilized this approach to equipment diagnostic analyses is reviewed. The identification and quantification of the speed loss categories, along with implementation of specific actions targeted at these losses, had a direct impact on overall capacity and throughput performance of the toolset.