Localized closed-loop temperature control and regulation in hybrid silicon/silicone life science microsystems

We present hybrid silicon/silicone microsystem for closed-loop temperature control with applications in the life sciences. The system architecture includes an integrated CMOS die for localized thermal cycling and a disposable PDMS microfluidic structure for aseptic fluidic manipulation. Chip design, experimental results and finite element analysis are presented. This work is based on criteria for a clinical diagnostics system comprised of disposable microfluidics for use in tandem with CMOS electronics.