A Wireless Strain Sensing Microsystem with External RF Power Source and Two-Channel Data Telemetry Capability

A wireless strain sensing microsystem is powered by a 50MHz signal and can simultaneously telemeter both digitized strain and temperature data over the RF powering link using passive PSK and ASK modulations, respectively. The prototype system achieves a minimum detectable strain of 0.87muepsiv over a 10kHz bandwidth with a maximum input signal of plusmn1000muepsiv. The temperature sensor resolution is 0.02Cdeg
_rms
with a 100Hz BW. The chip is fabricated in 1.5mum CMOS and dissipates 6mW