A Simulation Study of Silicon Avalanche Photodiodes

In this paper we report simulation results of photon entrance window and AR (antireflection) coating. Also a simulation result of reverse type APD is presented for the detection of visible light from scintillator crystals by using the process simulation tool Athena and device simulation tool Atlas from Silvaco International. The fabrication method used in the process simulation of the device is conventional ion implantation and diffusion method.