P2I-1 Surface Acoustic Wave Ultraviolet Sensor Using Epitaxial AlGaN/(Al,Ga)N Film

In order to realize SAW ultraviolet sensor with short variable wavelength selectivity and high sensitivity, we study a SAW ultraviolet sensor using the AlGaN/(Al, Ga)N/Al
₂
O
₃
system. When irradiating UV light on the surface of propagating path, the shift of frequency and change of insertion loss can be measured. Experimental results indicate that this sensor have good wavelength selectivity and could detect the weaker UV light power with several microwatt