3K-5 Electrical Parameter Extraction of a Flexural Plate Wave Device Using the Finite Element Method

A study was conducted on the use of the Finite Element (FE) method to determine key electrical parameters of a Flexural Plate Wave (FPW) device. This paper illustrates that the FE method can be successfully applied to extract admittance and frequency response characteristics of complex acoustic wave devices. Second order effects such as electromagnetic feedthrough, triple transit and diffraction can be accounted for, which cannot be easily evaluated concurrently by other methods. Excellent agreement has been achieved between this novel approach and an alternative formulation based on a spectral Green's function