5I-1 Microfabrication of Piezoelectric Composite Ultrasound Transducers (PC-MUT)

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) fabrication technology is presented. PMN-PT single crystal posts with side length of 14 mum and height of > 60 mum were fabricated using a deep dry etching method. High frequency (20-50 MHz) PMN-PT single crystal/epoxy 1-3 composites were prepared and the electromechanical coupling coefficient of the composites was ~0.72. Prototype 40 MHz ultrasound transducers showed promising sensitivity and bandwidth