On-Chip Microwave Filters on Standard Silicon Substrate Incorporating a Low-k BCB Dielectric Layer

A low-loss, low-pass microstrip transmission line based microwave filter using 6-μm low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.