Wide Band Series Switch Fabricated Using Metal As Sacrificial layer

Series switches with metal-to-metal contact have been fabricated to operate from dc to 40 GHz. The insertion loss has been measured to be less than 0.4 dB at 5 GHz and 0.8 dB at 40 GHz when switch is on and the isolation ranges from 38 dB at 2 GHz to 15 dB at 40 GHz when the switch is off. The results agree well with simulation by Zeland IE3D. Cantilever beam is used as the mechanical structure and CPW line works as the transmission line. The cantilever is made of SiO2 and Al is used as the sacrificial layer.