Efficient Parameter Extraction for 3-D Structures in Layered Dielectric Media

Boundary element methods (BEM) are often used to extract models of integrated circuit structures. BEM extraction, however, involves solving a dense system of linear equations, and using direct factorization methods can be prohibitive for large problems. In this paper we describe a novel algorithm for efficient parameter extraction of conductors embedded in multi-layered dielectric media. A Green's function, which accounts for the variation in the layered dielectric media, is constructed from image theory [8]. We then use an SVD-accelerated Method of Moments (MoM) solver [2] for the solution of the associated dense matrix. Results are presented to show that the method is accurate and can be two orders of magnitude faster than Gaussian elimination and one order of magnitude faster than standard iterative schemes. The algorithm is used for the extraction of parasitics for an RF IC test socket. The extracted equivalent circuit model is compared to measurements and found to agree within 3 dB.