Accurate Series-Resistance Extraction From Capacitor Using Time Domain Reflectometry

For advanced CMOS technology, series resistance is an important source of error in capacitance-voltage (C-V) measurement. Independent accurate determination of series resistance is generally not possible. Recently, we introduced a new C-V measurement method using time domain reflectometry (TDR). Here, we show that the TDR method also allows series resistance to be determined independently and accurately